Claeys, CorCorClaeysSimoen, EddyEddySimoenOpsomer, KarlKarlOpsomerBrunco, DavidDavidBruncoMeuris, MarcMarcMeuris2021-10-172021-10-1720080921-5107https://imec-publications.be/handle/20.500.12860/13536Defect engineering aspects of advanced Ge process modulesJournal article