Pieters, PhilipPhilipPietersBorzi, RaffaellaRaffaellaBorziWitvrouw, AnnAnnWitvrouw2021-10-152021-10-152004-04https://imec-publications.be/handle/20.500.12860/9431Poly-SiGe as novel MEMS-CMOS integration technologyProceedings paper