Diamond scanning probes with sub-nanometer resolution for advanced nanoelectronics device characterization

Hantschel, ThomasThomasHantschelXu, ZhengZhengXuParedis, KristofKristofParedisSchulze, AndreasAndreasSchulzeVandervorst, WilfriedWilfriedVandervorst2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25362Diamond scanning probes with sub-nanometer resolution for advanced nanoelectronics device characterizationMeeting abstracthttp://mne2015.org/programme/full-programme/