Bogaerts, WimWimBogaertsDumon, PieterPieterDumonTaillaert, DirkDirkTaillaertWiaux, VincentVincentWiauxBeckx, StephanStephanBeckxLuyssaert, BertBertLuyssaertVan Campenhout, JanJanVan CampenhoutVan Thourhout, DriesDriesVan ThourhoutBaets, RoelRoelBaets2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/8602SOI nanophotonic waveguide structures fabricated with Deep UV lithographyJournal article