One- and two-dimensional carrier profiling in semiconductors by nanospreading resistance profiling

De Wolf, PeterPeterDe WolfClarysse, TrudoTrudoClarysseVandervorst, WilfriedWilfriedVandervorstSnauwaert, J.J.SnauwaertHellemans, L.L.Hellemans2021-09-292021-09-291996https://imec-publications.be/handle/20.500.12860/1179One- and two-dimensional carrier profiling in semiconductors by nanospreading resistance profilingJournal article