Muessig, Hans-JoachimHans-JoachimMuessigSchroeder, ThomasCapellini, GiovanniLoo, RogerFompeyrine, Jean2021-10-222021-10-222014-080167-9317https://imec-publications.be/handle/20.500.12860/24284Alternative semiconductor integration in Si microelectronics: materials, techniques & applications (Selected papers from the E-MRS 2013 Fall Meeting, Symposium A). Preface to the special issueBookhttp://www.sciencedirect.com/science/journal/01679317/125