Collaert, NadineNadineCollaertWaldron, NiamhNiamhWaldronMerckling, ClementClementMercklingWitters, LiesbethLiesbethWittersLoo, RogerRogerLooMitard, JeromeJeromeMitardPourghaderi, Mohammad AliMohammad AliPourghaderiEneman, GeertGeertEnemanBarla, KathyKathyBarlaThean, AaronAaronThean2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/23675III-V and germanium FinFET devices integrated on a 300mm Si platformOral presentation