Chollet, FredericFredericCholletAndré, E.E.AndréVandervorst, WilfriedWilfriedVandervorstCaymax, MattyMattyCaymax2021-09-292021-09-291995https://imec-publications.be/handle/20.500.12860/553Si(100) epitaxy by low-temperature UHV-CVD: AFM study of the initial stages of growthJournal article