Piezoresistivity in ultra-thin boron-doped and surface conductive nanocrystalline diamond membranes

Janssens, Stoffel D.Stoffel D.JanssensDrijkoningen, SienSienDrijkoningenKoizumi, SatoshiSatoshiKoizumiHaenen, KenKenHaenen2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25426Piezoresistivity in ultra-thin boron-doped and surface conductive nanocrystalline diamond membranesOral presentation