Low loss amorphous silicon photonic wire and ring resonator fabricated by CMOS process

Selvaraja, ShankarShankarSelvarajaSleeckx, ErikErikSleeckxBogaerts, WimWimBogaertsSchaekers, MarcMarcSchaekersDumon, PieterPieterDumonVan Thourhout, DriesDriesVan ThourhoutBaets, RoelRoelBaets2021-10-162021-10-162007-09https://imec-publications.be/handle/20.500.12860/12877Low loss amorphous silicon photonic wire and ring resonator fabricated by CMOS processProceedings paper