Experimental Study Of Interface & Bulk Defectivity In Ultra-Thin BEOL Dielectrics By Using Low Frequency Noise Spectroscopy

Saini, NishantNishantSainiTierno, DavideDavideTiernoCroes, KristofKristofCroesAfanasiev, ValeriValeriAfanasiev2023-11-302023-08-072023-11-3020232380-632XWOS:001027381700036https://imec-publications.be/handle/20.500.12860/42292Experimental Study Of Interface & Bulk Defectivity In Ultra-Thin BEOL Dielectrics By Using Low Frequency Noise SpectroscopyProceedings paper10.1109/IITC/MAM57687.2023.10154814979-8-3503-1097-9WOS:001027381700036BREAKDOWN