Effect of varying the initial conditions prior to flash-assist rapid thermal processing on dopant activation, diffusion, and defect populations

Camillo-Castillo, RenataRenataCamillo-CastilloLaw, M.E.M.E.LawLindsay, RichardRichardLindsayMaex, KarenKarenMaexPawlak, BartekBartekPawlakMcCoy, S.S.McCoy2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10172Effect of varying the initial conditions prior to flash-assist rapid thermal processing on dopant activation, diffusion, and defect populationsOral presentation