Atmospheric and low pressure shadow masked MOVPE growth of InGaAs(P)/InP and (In)GaAs/(Al)GaAs heterostructures and quantum wells

Coudenys, G.G.CoudenysMoerman, IngridIngridMoermanVermeire, GerritGerritVermeireVermaerke, FrankFrankVermaerkeZhu, Y.Y.ZhuVan Daele, P.P.Van DaeleDemeester, PietPietDemeesterMaayan, E.E.MaayanElsner, B.B.ElsnerSalzman, J.J.SalzmanFinkman, E.E.Finkman2021-09-292021-09-291994https://imec-publications.be/handle/20.500.12860/90Atmospheric and low pressure shadow masked MOVPE growth of InGaAs(P)/InP and (In)GaAs/(Al)GaAs heterostructures and quantum wellsJournal article