Kljucar, LukaLukaKljucarMitard, JeromeJeromeMitardRassoul, NouredineNouredineRassoulDekkers, HaroldHaroldDekkersSteudel, SoerenSoerenSteudeldel Agua Borniquel, Jose IgnacioJose Ignaciodel Agua BorniquelDe Wachter, BartBartDe WachterTeugels, LieveLieveTeugelsTsvetanova, DianaDianaTsvetanovaDevriendt, KatiaKatiaDevriendtGrisin, IljaIljaGrisinBoccardi, GuillaumeGuillaumeBoccardiHody, HubertHubertHodyNag, ManojManojNagDi Piazza, LucaLucaDi PiazzaWilson, ChrisChrisWilsonKar, Gouri SankarGouri SankarKarTokei, ZsoltZsoltTokeiRamalingam, J.J.RamalingamCao, YongYongCaoDiehl, Daniel L.Daniel L.Diehl2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/33304IGZO integration scheme for enabling IGZO nFETsProceedings paperhttps://confit.atlas.jp/guide/event/ssdm2019/subject/G-1-02/detail?lang=en