Wouters, DirkDirkWoutersEveraert, Jean-LucJean-LucEveraertSchwitters, MichaelMichaelSchwittersJohnson, JoJoJohnsonVander Meeren, HansHansVander MeerenMonchoix, H.H.MonchoixMitaut, C.C.MitautVan Autryve, L.L.Van AutryveCaputa, C.C.CaputaZambrano, R.R.Zambrano2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/8408MOCVD-SBT thin films for advanced FeRAM: deposition and film formation processesMeeting abstract