High resolution depth profile analysis of ultra-thin STO/TiN layers on Si by LEIS

Brongersma, HiddeHiddeBrongersmaBauer, PeterPeterBauerBrüner, PhilippPhilippBrünerGrehl, ThomasThomasGrehlVan den Berg, JaapJaapVan den BergAdelmann, ChristophChristophAdelmann2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/20394High resolution depth profile analysis of ultra-thin STO/TiN layers on Si by LEISOral presentation