Litho variations and their impact on the electrical yield of a 32nm node 6T-SRAM cell

Verhaegen, StafStafVerhaegenCosemans, StefanStefanCosemansDusa, MirceaMirceaDusaMarchal, PolPolMarchalNackaerts, AxelAxelNackaertsVandenberghe, GeertGeertVandenbergheDehaene, WimWimDehaene2021-10-172021-10-172008-02https://imec-publications.be/handle/20.500.12860/14743Litho variations and their impact on the electrical yield of a 32nm node 6T-SRAM cellProceedings paper