Reliability Study of Polymers Used in Sub-4-mu m Pitch RDL Applications

Chery, EmmanuelEmmanuelCheryDuval, FabriceFabriceDuvalStucchi, MicheleMicheleStucchiSlabbekoorn, JohnJohnSlabbekoornCroes, KristofKristofCroesBeyne, EricEricBeyne2022-02-222022-02-2220212156-3950WOS:000675202100009https://imec-publications.be/handle/20.500.12860/38989Reliability Study of Polymers Used in Sub-4-mu m Pitch RDL ApplicationsJournal article10.1109/TCPMT.2021.3079515WOS:000675202100009CU THIN-FILMSLOW-TEMPERATUREOXIDATIONWATERPERMITTIVITYRESISTIVITYKINETICS