Controlling Etch Anisotropy of Crystalline Germanium Nanostructures

Saidov, KhakimjonKhakimjonSaidovAabdin, ZainulZainulAabdinYan, HongweiHongweiYanPacco, AntoineAntoinePaccoHolsteyns, FrankFrankHolsteynsMirsaidov, UtkurUtkurMirsaidov2025-09-062025-09-062025-AUG 21613-6810WOS:001559862700001https://imec-publications.be/handle/20.500.12860/46150Controlling Etch Anisotropy of Crystalline Germanium NanostructuresJournal article10.1002/smll.202504357WOS:001559862700001PERFORMANCESURFACEGESI