Rothschild, AudeAudeRothschildNishibe, NishibeNishibeNishibeCui, JianliJianliCuiZhu, NanchangNanchangZhuDebucquoy, MaartenMaartenDebucquoyMamagkakis, StylianosStylianosMamagkakisNagaswami, VenkatVenkatNagaswamiJohn, JoachimJoachimJohn2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/19707Al2O3 surface passivation : electrical characterization using the Quantox toolProceedings paper