Janssens, TomTomJanssensPosthuma, NielsNielsPosthumaVan Kerschaver, EmmanuelEmmanuelVan KerschaverBaert, KrisKrisBaertChoulat, PatrickPatrickChoulatEveraert, Jean-LucJean-LucEveraertGoossens, JozefienJozefienGoossensVandervorst, WilfriedWilfriedVandervorstPoortmans, JefJefPoortmans2021-10-172021-10-172009https://imec-publications.be/handle/20.500.12860/15537Advanced phosphorus emitters for high efficiency Si solar cellsProceedings paper