Pollentier, IvanIvanPollentierVanpaemel, JohannesJohannesVanpaemelLee, Jae UkJae UkLeeAdelmann, ChristophChristophAdelmannZahedmanesh, HoumanHoumanZahedmaneshHuyghebaert, CedricCedricHuyghebaertGallagher, EmilyEmilyGallagher2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/27157EUV lithography imaging using novel pellicle membranesProceedings paperhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2505818