Assessment of challenges in EUV resist outgassing and contamination characterization

Pollentier, IvanIvanPollentierLokasani, RagavaRagavaLokasaniGronheid, RoelRoelGronheid2021-10-202021-10-2020120914-9244https://imec-publications.be/handle/20.500.12860/21321Assessment of challenges in EUV resist outgassing and contamination characterizationJournal article