Scheerlinck, StijnStijnScheerlinckPedersen, R.R.PedersenDumon, PieterPieterDumonBogaerts, WimWimBogaertsPlachetka, U.U.PlachetkaVan Thourhout, DriesDriesVan ThourhoutBaets, RoelRoelBaetsKristensen, A.A.Kristensen2021-10-172021-10-172008-05https://imec-publications.be/handle/20.500.12860/14429Fabrication of nanophotonic circuit components by thermal nano imprint lithographyProceedings paper