Oliver, M.J.M.J.OliverHernando-Garcia, J.J.Hernando-GarciaSanchez-Rojas, J.L.J.L.Sanchez-RojasAbabneh, A.A.AbabnehSeidel, H.H.SeidelSchmid, U.U.SchmidOlivares, J.J.OlivaresIborra, E.E.IborraPobedinskas, P.P.PobedinskasHaenen, KenKenHaenen2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/19509Resonant piezoelectric AlN-actuated microcantilevers for detection of antigen/antibody interactionsProceedings paper