Vaglio Pret, AlessandroAlessandroVaglio PretKunnen, EddyEddyKunnenGronheid, RoelRoelGronheidPargon, ErwineErwinePargonLuere, OlivierOlivierLuereBianchi, DavideDavideBianchi2021-10-212021-10-2120130167-9317https://imec-publications.be/handle/20.500.12860/232112D and 3D photoresist line roughness characterizationJournal article