Controlled III/V nanowire growth by selective-area vapour phase epitaxy

Cantoro, MircoMircoCantoroBrammertz, GuyGuyBrammertzRichard, OlivierOlivierRichardClemente, FrancescaFrancescaClementeLeys, MaartenMaartenLeysDegroote, StefanStefanDegrooteCaymax, MattyMattyCaymaxHeyns, MarcMarcHeynsDe Gendt, StefanStefanDe Gendt2021-10-172021-10-172009https://imec-publications.be/handle/20.500.12860/15062Controlled III/V nanowire growth by selective-area vapour phase epitaxyProceedings paperhttp://scitation.aip.org/getpdf/servlet/GetPDFServlet?filetype=pdf&id=ECSTF8000019000005000309000001&idtype=cvips&prog=normal