Use of MIR-FTIR and k-value measurements to assess potential solutions to reduce damage during porous low-k integration

Beynet, JulienJulienBeynetDe Roest, DavidDavidDe RoestRochat, N.N.RochatKellens, KristofKristofKellensVerdonck, PatrickPatrickVerdonckSprey, HesselHesselSprey2021-10-172021-10-172009https://imec-publications.be/handle/20.500.12860/14997Use of MIR-FTIR and k-value measurements to assess potential solutions to reduce damage during porous low-k integrationProceedings paper