Popovici, Mihaela IoanaMihaela IoanaPopoviciDelabie, AnneliesAnneliesDelabieVan Elshocht, SvenSvenVan ElshochtMenou, NicolasNicolasMenouWang, Xin PengXin PengWangWouters, DirkDirkWoutersKittl, JorgeJorgeKittlSwerts, JohanJohanSwertsKnaepen, W.W.KnaepenDetavernier, ChristopheChristopheDetavernier2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14334Atomic layer deposition of hafnium titanates dielectric layersProceedings paper