Diehle, PatrickPatrickDiehleHübner, SusanneSusanneHübnerDe Santi, CarloCarloDe SantiMukherjee, KalparupaKalparupaMukherjeeZanoni, EnricoEnricoZanoniMeneghini, MatteoMatteoMeneghiniGeens, KarenKarenGeensYou, ShuzhenShuzhenYouDecoutere, StefaanStefaanDecoutereAltmann, FrankFrankAltmann2021-10-312021-10-312021https://imec-publications.be/handle/20.500.12860/36674Root cause analysis of gate shorts in semi-vertical GaN MOSFET devicesProceedings paperhttps://ieeexplore.ieee.org/document/9393835