RTS diagnostics of source-drain (edge?) related defects in submicron n-MOSFETs

Lukyanchikova, N.N.LukyanchikovaPetrichuk, M. V.M. V.PetrichukGarbar, N.N.GarbarSimoen, EddyEddySimoenClaeys, CorCorClaeys2021-09-302021-09-301997https://imec-publications.be/handle/20.500.12860/2005RTS diagnostics of source-drain (edge?) related defects in submicron n-MOSFETsProceedings paper