Fabrication of a micro-lens array for Reflective Electron Beam Lithography

Vereecke, BartBartVereeckeHaspeslagh, LucLucHaspeslaghLazzarino, FredericFredericLazzarinoMiller, AndyAndyMillerKellens, KristofKristofKellensDekkers, HaroldHaroldDekkersFreed, ReginaReginaFreedGrella, L.L.Grella2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/20054Fabrication of a micro-lens array for Reflective Electron Beam LithographyProceedings paper