Design and analysis of an in-plane resonant nano-electro-mechanical sensor for sub-attogram-level molecular mass-detection

Hassani, Faezeh A.Faezeh A.HassaniCobianu, CornelCornelCobianuArmini, SilviaSilviaArminiPetrescu, VioletaVioletaPetrescuMerken, PatrickPatrickMerkenTsamados, DimitriosDimitriosTsamadosIonescu, Adrian M.Adrian M.IonescuTsuchiya, YoshishigeYoshishigeTsuchiyaMizuta, HiroshiHiroshiMizuta2021-10-172021-10-172009https://imec-publications.be/handle/20.500.12860/15445Design and analysis of an in-plane resonant nano-electro-mechanical sensor for sub-attogram-level molecular mass-detectionProceedings paper