Finders, JoJoFindersvan Schoot, J.J.van SchootVanoppen, PeterPeterVanoppenDusa, M.M.DusaSocha, B.B.SochaVandenberghe, GeertGeertVandenbergheRonse, KurtKurtRonse2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4368KrF lithography for 130nmProceedings paper