From Piranha to Barracuda: mechanism of ozone and water vapor photoresistant strip in a wet bench

Riedel, T.T.RiedelWolke, K.K.WolkeDe Gendt, StefanStefanDe GendtOnsia, BartBartOnsia2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5612From Piranha to Barracuda: mechanism of ozone and water vapor photoresistant strip in a wet benchProceedings paper