Van Elshocht, SvenSvenVan ElshochtHardy, AnAnHardyAdelmann, ChristophChristophAdelmannCaymax, MattyMattyCaymaxConard, ThierryThierryConardFranquet, AlexisAlexisFranquetRichard, OlivierOlivierRichardVan Bael, MarliesMarliesVan BaelMullens, J.J.MullensDe Gendt, StefanStefanDe Gendt2021-10-172021-10-1720080013-4651https://imec-publications.be/handle/20.500.12860/14639Impact of process optimizations on the electrical performance of high-k layers deposited by aqueous chemical solution depositionJournal article