Hoofman, RomanoRomanoHoofmanMichelon, JulienJulienMichelonVerheijden, G.J.A.M.G.J.A.M.VerheijdenWaeterloos, JoostJoostWaeterloosCaluwaerts, RudyRudyCaluwaertsSchmidt, M.O.M.O.SchmidtDemeurisse, CarolineCarolineDemeurisseVandeweyer, TomTomVandeweyerDemuynck, StevenStevenDemuynckTokei, ZsoltZsoltTokeiBeyer, GeraldGeraldBeyer2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9050A feasibility study of dual damascene porous SiLK resin with spin-on hard masksProceedings paper