3D-printed optical probes for wafer-level testing of photonic integrated circuits

Trappen, MareikeMareikeTrappenBlaicher, MatthiasMatthiasBlaicherDietrich, Philipp-ImmanuelPhilipp-ImmanuelDietrichDankwart, ColinColinDankwartXu, YilinYilinXuHoose, TobiasTobiasHooseBillah, Muhammad RodlinMuhammad RodlinBillahAbbasi, AminAminAbbasiBaets, RoelRoelBaetsTroppenz, UteUteTroppenzTheurer, MichaelMichaelTheurerWoerhoff, KerstinKerstinWoerhoffSeyfried, MoritzMoritzSeyfriedFreude, WolfgangWolfgangFreudeKoos, ChristianChristianKoos2022-01-032021-11-022022-01-0320201094-4087WOS:000596707100073https://imec-publications.be/handle/20.500.12860/382773D-printed optical probes for wafer-level testing of photonic integrated circuitsJournal article10.1364/OE.405139WOS:000596707100073MEDLINE:33379622