Smirnov, EvgenyEvgenySmirnovPantouvaki, MariannaMariannaPantouvakiHuffman, CraigCraigHuffmanVanstreels, KrisKrisVanstreelsBaklanov, MikhaïlMikhaïlBaklanov2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/19807Plasma sealing of advanced organic low-k materialOral presentation