Impact of halo implant on the hot carrier reliability of germanium pMOSFETs

Franco, JacopoJacopoFrancoEneman, GeertGeertEnemanKaczer, BenBenKaczerMitard, JeromeJeromeMitardGroeseneken, GuidoGuidoGroeseneken2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17112Impact of halo implant on the hot carrier reliability of germanium pMOSFETsOral presentation