Lorusso, GianGianLorussoBeral, ChristopheChristopheBeralBogdanowicz, JanuszJanuszBogdanowiczDe Simone, DaniloDaniloDe SimoneHasan, MahmudulMahmudulHasanJehoul, ChristianeChristianeJehoulMoussa, AlainAlainMoussaSaib, MohamedMohamedSaibZidan, MohamedMohamedZidanSeveri, JorenJorenSeveriTruffert, VincentVincentTruffertVan Den Heuvel, DieterDieterVan Den HeuvelGoldenshtein, AlexAlexGoldenshteinHouchens, KevinKevinHouchensSantoro, GaetanoGaetanoSantoroFischer, DanielDanielFischerMuellender, AngelikaAngelikaMuellenderHung, JoeyJoeyHungKoret, RoyRoyKoretTurovets, IgorIgorTurovetsAusschnitte, KitKitAusschnitteMack, ChrisChrisMackKondo, TsuyoshiTsuyoshiKondoShohjoh, TomoyasuTomoyasuShohjohIkota, MasamiMasamiIkotaCharley, Anne-LaureAnne-LaureCharleyLeray, PhilippePhilippeLeray2022-11-292022-09-082022-11-292022978-1-5106-4981-10277-786XWOS:000844549800023https://imec-publications.be/handle/20.500.12860/40378Metrology of Thin Resist for High NA EUVLProceedings paper10.1117/12.2614046978-1-5106-4982-8WOS:000844549800023