Transfer of a thin silicon film on to a ceramic substrate

Solanki, Chetan SinghChetan SinghSolankiBilyalov, RenatRenatBilyalovPoortmans, JefJefPoortmansNijs, JohanJohanNijs2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6841Transfer of a thin silicon film on to a ceramic substrateJournal article