Fabrication of photonic wire and crystal circuits in silicon-on-insulator using 193nm optical lithography

Selvaraja, ShankarShankarSelvarajaJaenen, PatrickPatrickJaenenBogaerts, WimWimBogaertsVan Thourhout, DriesDriesVan ThourhoutDumon, PieterPieterDumonBaets, RoelRoelBaets2021-10-182021-10-182009-01https://imec-publications.be/handle/20.500.12860/16197Fabrication of photonic wire and crystal circuits in silicon-on-insulator using 193nm optical lithographyJournal article