Maes, DennisDennisMaesLemey, SamSamLemeyRoelkens, GuntherGuntherRoelkensZaknoune, MohammedMohammedZaknouneAvramovic, VanessaVanessaAvramovicOkada, EtienneEtienneOkadaSzriftgiser, PascalPascalSzriftgiserPeytavit, EmilienEmilienPeytavitDucournau, GuillaumeGuillaumeDucournauKuyken, BartBartKuyken2023-07-042023-02-262023-02-272023-07-0420232378-0967WOS:000914877200002https://imec-publications.be/handle/20.500.12860/41148High-speed uni-traveling-carrier photodiodes on silicon nitrideJournal article10.1063/5.0119244WOS:000914877200002