Vincent, BenjaminBenjaminVincentGencarelli, FedericaFedericaGencarelliKumar, ArulArulKumarVantomme, AndreAndreVantommeMerckling, ClementClementMercklingLin, DennisDennisLinAfanasiev, ValeriValeriAfanasievEneman, GeertGeertEnemanClarysse, TrudoTrudoClarysseFirrincieli, AndreaAndreaFirrincieliVandervorst, WilfriedWilfriedVandervorstDekoster, JohanJohanDekosterLoo, RogerRogerLooCaymax, MattyMattyCaymax2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21804CVD epitaxial growth of GeSn opens a new route for advanced Sn-based logic and photonics devicesProceedings paper