Experimental Demonstration of the High Alignment-Tolerant Behavior of a Mid-Infrared Waveguide Platform for Evanescent Field Sensing

Frank, FelixFelixFrankVerstuyft, MattiasMattiasVerstuyftTeigell Beneitez, NuriaNuriaTeigell BeneitezMissinne, JeroenJeroenMissinneRoelkens, GuntherGuntherRoelkensVan Thourhout, DriesDriesVan ThourhoutLendl, BernhardBernhardLendl2024-12-152024-12-152024-AUG 22771-9855WOS:001371186700001https://imec-publications.be/handle/20.500.12860/44968Experimental Demonstration of the High Alignment-Tolerant Behavior of a Mid-Infrared Waveguide Platform for Evanescent Field SensingJournal article10.1021/acsaom.4c00280WOS:001371186700001PHOTONIC INTEGRATED-CIRCUITSSILICONGEFILMSCHIPMEDLINE:39360237