On the characterisation of grown-in defects in Czocharski-grown Si and Ge

Vanhellemont, JanJanVanhellemontVan Steenbergen, JanJanVan SteenbergenHolsteyns, FrankFrankHolsteynsRoussel, PhilippePhilippeRousselMeuris, MarcMarcMeurisMlynarczyk, K.K.MlynarczykSpiewak, P.P.SpiewakGeens, WimWimGeensRomandic, I.I.Romandic2021-10-172021-10-1720080957-4522https://imec-publications.be/handle/20.500.12860/14721On the characterisation of grown-in defects in Czocharski-grown Si and GeJournal article