Bekaert, JoostJoostBekaertGallagher, EmilyEmilyGallagherJonckheere, RikRikJonckheereVan Look, LieveLieveVan LookAubert, RemkoRemkoAubertKlein, AlexanderAlexanderKleinYegen, GokayGokayYegenBroman, ParParBromanFelix, Nelson M.Nelson M.FelixLio, AnnaAnnaLioNair, Vineet VijayakrishnanVineet VijayakrishnanNairTimmermans, MarinaMarinaTimmermansPollentier, IvanIvanPollentierHendrickx, EricEricHendrickx2022-03-112022-03-112021978-1-5106-4051-10277-786XWOS:000672825700021https://imec-publications.be/handle/20.500.12860/39409CNT pellicles: Imaging results of the first full-field EUV exposuresProceedings paper10.1117/12.2584724978-1-5106-4052-8WOS:000672825700021