Plasma induced damage mitigation in spin-on self-assembly based ultra low-k dielectrics using template residues

Krishtab, MikhailMikhailKrishtabde Marneffe, Jean-FrancoisJean-Francoisde MarneffeDe Gendt, StefanStefanDe Gendt2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/26850Plasma induced damage mitigation in spin-on self-assembly based ultra low-k dielectrics using template residuesMeeting abstracthttp://pesm2016.insight-outside.fr/index.php?langue=en&onglet=11&acces=&idUser=&emailUser=&messageConfirmation=