Pawlak, BartekBartekPawlakLindsay, RichardRichardLindsayVandervorst, WilfriedWilfriedVandervorstKittl, JorgeJorgeKittlSurdeanu, RaduRaduSurdeanuDuffy, RayRayDuffyStolk, P.P.Stolk2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7990Chemical and electrical dopant evolution during solid phase epitaxial regrowthProceedings paper